Abstract
The freeform surface quality is limited by the measurement, and form error cannot be convergent via compensation machining. This paper proposed a surface matching measurement strategy based on the least squares principle and iterative precision adjustment to precisely obtain surface form error after manufacturing by single point diamond turning. Through the coordinate transformation of translation and rotation, the measured surface was aligned with theoretical surface at the same coordinate system. The corresponding simulation was carried out to verify the performance of the proposed method, and the simulation results indicated that this method can achieve accurate alignment in a sub-nanometer range. Finally, with XY polynomial freeform surface as the ideal surface, compensation experiments were undertaken. The form error of freeform converged continuously after compensation machining for three times, during which the form accuracy of PV and RMS were down to 335 nm and 34 nm respectively from 1.4 um and 173 nm. The results showed that capability of the proposed compensation method was verified and the form accuracy could be improved effectively.
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