Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps.

Philipp Taus,Mostafa M Shawrav,Adrian Prinz,Markus Schinnerl,Anton Tsenov,Michael Haslinger,Patrick Schuller,Heinz D Wanzenboeck,Michael Muehlberger

doi:10.3390/nano11040956

Philipp Taus, Mostafa M Shawrav + Show 7 more

Open Access

https://doi.org/10.3390/nano11040956

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Abstract

Biomimetic structures such as structural colors demand a fabrication technology of complex three-dimensional nanostructures on large areas. Nanoimprint lithography (NIL) is capable of large area replication of three-dimensional structures, but the master stamp fabrication is often a bottleneck. We have demonstrated different approaches allowing for the generation of sophisticated undercut T-shaped masters for NIL replication. With a layer-stack of phase transition material (PTM) on poly-Si, we have demonstrated the successful fabrication of a single layer undercut T-shaped structure. With a multilayer-stack of silicon oxide on silicon, we have shown the successful fabrication of a multilayer undercut T-shaped structures. For patterning optical lithography, electron beam lithography and nanoimprint lithography have been compared and have yielded structures from 10 µm down to 300 nm. The multilayer undercut T-shaped structures closely resemble the geometry of the surface of a Morpho butterfly, and may be used in future to replicate structural colors on artificial surfaces.

Highlights

In biology, surfaces with three-dimensional nanostructures are responsible for outstanding physicochemical properties of the surface
The challenge is the fabrication on a larger surface area—here nanoimprint lithography has a lot of potential [8]
The phase transition material (PTM) hard mask [41] was manufactured by Blu-Ray mastering, which is an industrial production technique used for optical memory devices of 120 mm diameter

Summary

Introduction

Surfaces with three-dimensional nanostructures are responsible for outstanding physicochemical properties of the surface. The anti-wetting surface of the lotus flower, the low friction surface of shark skin and the high sticking capability of Gecko feet are well-described. Another exceptional example is structural color: Not chemical pigmentation, but a complex structured multilayered nanostructure, is the cause of the brilliant blue wing colors in some of the species of morpho butterflies and the golden color of the beetle Chrysina aurigans [1,2]. A wide range of lithographic methods has been successfully applied for three-dimensionally structured surfaces [4,5,6,7]. The challenge is the fabrication on a larger surface area—here nanoimprint lithography has a lot of potential [8]

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