Master Recording for High-Density Disk Using 248 nm Laser Beam Recorder

Abstract

A deep ultra-violet (UV) laser beam recorder (LBR) with 248 nm wavelength was developed to realize a high-density disk. The characteristics of the LBR are the wavelength and the multifunctional design. Among the possible laser wavelengths, 248 nm is the shortest wavelength applicable with Novolac photoresist, and the LBR has both modulation and deflection functions to support various formats flexibly. It was confirmed that the LBR performance was such that a groove of even 0.26 µm track pitch could be recorded, and the shape was observed with a scanning electron microscope (SEM). The disk with a groove of 0.32 µm track pitch recorded by the LBR had a practical deviation in the tracking error signal, and the addressed disk with phase-change material and a 0.1-mm-thick cover layer showed the stable reproduction of the address and a practical jitter at the equivalent density for achieving 25 GB capacity at 120 mm in diameter, on the condition of having a pick-up head with a wavelength of 400 nm and an NA of 0.85.