Abstract
The transmission of soft x rays with photon energies from 1606 eV to 2106 eV was measured for tungsten using thin-film samples and a synchrotron source. This region includes the ${M}_{\mathrm{IV}}$ and ${M}_{\mathrm{V}}$ edges. The two tungsten films had thicknesses of $107.7\ifmmode\pm\else\textpm\fi{}10 \mathrm{nm}$ and $51.5\ifmmode\pm\else\textpm\fi{}10 \mathrm{nm};$ the intensity of the transmitted x rays was measured with a silicon photodiode. The values for the mass absorption coefficient reported here were determined from the ratios of the transmission through the two samples, i.e., through a net $56.2\ifmmode\pm\else\textpm\fi{}14 \mathrm{nm}$ of tungsten, and some additional constant factors. The ${M}_{\mathrm{V},\mathrm{I}\mathrm{V}}$ edges have widths (10%--90% after background subtraction) of $33\ifmmode\pm\else\textpm\fi{}5 \mathrm{eV}$ and $28\ifmmode\pm\else\textpm\fi{}5 \mathrm{eV},$ respectively, compared to zero width in all x-ray tables based on atomic form factors and to 41 eV and 44 eV within a real-space multiple-scattering theory. The measurements are relevant to microspectroscopy and microtomography of integrated circuit interconnects and may be applicable to accurate measurement of the mass absorption coefficients of similar dense elements.
Published Version
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