Abstract
A series of FeCoN films were successfully deposited on glass substrates in a magnetron sputtering system. Using oblique incidence method and FeCoN/Ru/FeCoN synthetic antiferromagnetic (SAF) structure, two additional anisotropies energy were introduced: oblique incidence anisotropy and exchange anisotropy energy, which marked enhancement of the effective magnetic anisotropy (Hk). The increment of Hk results in a significant improvement in the roll-off frequency of these films. The roll-off frequency of FeCoN/Ru/FeCoN films with SAF structure can reach up to 8.6 GHz. A feasible approach to conveniently controlling Hk of soft magnetic thin films by using oblique deposition and SAF structure can further improve their properties for the potential applications in the high frequency region.
Highlights
With the fast development of communication and information technologies, more challenges lie in front of radio-frequency and microwave device designers
N2 flow ratio was chosen for the FeCoN single layer and synthetic antiferromagnetic (SAF) structure films because of the high magnetization, coercivity, and high resistivity
3a shows the hard axis hysteresis loops of the single films deposited at oblique angles peak appear
Summary
With the fast development of communication and information technologies, more challenges lie in front of radio-frequency and microwave device designers. FeCo thin films with isotropic magnetic properties are not applicable for high frequency applications. Many efforts have been adopted to increase the Hk of FeCo thin films, such as applying an induced magnetic field during film deposition [6], depositing on prestressed substrates [7] or flexible substrates [8], field annealing [9], stress inducing [10], oblique deposition [11], micro strip patterning [12], introducing gradient of the Hf concentration [13,14] and using an organic semiconductors underlayer [15]. Magnetic behavior and films aresingle produced using a direct current magnetronproperties, sputtering antiferromagnetic equipment with different oblique high-frequency of the films are discussed. Antiferromagnetic behavior and high-frequency performance of theFeCoN films are Nm) film and FeCoN (20 nm)/Ru (0.45 nm)/FeCoN (20 nm) SAF structure films were prepared on glass substrates (10 × 10 mm2) at room temperature by using a direct current magnetron.
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