Manufacturing of holographic optical elements with the help of chalcogenide resists

Abstract

This work is devoted to the investigations of the diffractive optical elements (DOE) fabrication with the help of optical methods and registering media on the base of chalcogenide vitreous semiconductors (ChVS). Most of attention is devoted to the processes of holographic diffraction gratings fabrication, but also are investigated formation processes of other types of optical elements. The results of the investigations on fabrication processes of DOE's with blazed profiles are discussed, method of DOE's direct recording with the help of sharpfocused laser beam is considered most perspective. Processes of obtaining the DOE's polymer copies from the initial ChVS matrices are considered. This can be done directly using the photopolymers, or by obtaining the phase-relief metallic matrixes with the following casting, embossing.