Manufacturing Anti-Reflective Subwavelength Structures on ZnS Using Femtosecond Laser Bessel Beam with Burst Mode

Abstract

Increasing the transmittance of zinc sulfide (ZnS) infrared windows can effectively improve the imaging quality of infrared detection. In this study, an anti-reflective subwavelength structure (ASS) was manufactured on ZnS using a femtosecond burst Bessel laser with the goal of achieving high transmittance in the mid-infrared range. The period and depth parameters of the ASS were initially determined using the effective medium approximation (EMA) theory and subsequently optimized using the rigorous coupled-wave analysis (RCWA) method to eliminate surface Fresnel anti-reflections. The depth of the ASS increases with the number of bursts, while the structure profile transitions from Gaussian to conical. In addition, the ASS achieves 86% transmittance in the 7–10 µm range, and the average transmittance improves by 10% in the 5–12 µm range. Moreover, the wide-angle ASS with the hydrophobicity (contact angle 160°) is achieved on the ZnS window. Ultimately, the ASS on ZnS enhances the clarity of the infrared image.