Abstract
This paper presents a new method to fabricate permanent magnetic(NdFeB) micro-robot as well as a motioncontrol algorithm that leads to "vibration-slip" motion of the micro-robot.MEMS(micro-electro-mechanical system) based graphical photolithography is introduced in robot fabricating process.A customized drive coil system for motion-control is designed.With its uniformly distributed magnetic field,the central cube space inside the coil system with a length of 2.5 cm is set for micro-robot motion.The configuration of the whole embedded system for coil system driving is introduced.A dynamic model of the micro-robot is established,and mathematical simulation of its "vibration-slip" motion mode is carried out.Linear 2D motion is demonstrated on the micro-robot in experiment.The result indicates that the magnetic micro-robot's wireless linear motion speed reaches an average of 10 mm/s.
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