Abstract

In the manufacturing processes of red-green-blue (RGB)-type organic light emitting diode (OLED) displays, Invar is used as a material for the fine metal mask (FMM), which guides the evaporated diode materials through its small holes onto the correct positions of the substrate glass. The electroforming of Invar is an immediate hot issue in the RGB-type OLED display industries. Contrary to the conventional top-down method of pyrometallurgically producing Invar, a bottom-up approach of electroforming is a promising technology for producing very thin FMMs to achieve high-quality images in such displays. The present authors have recently presented that the electroformed Invar via sophisticated heat treatment exhibits the coefficient of thermal expansion (CTE) as low as that of the conventional Invar. The current work has been aimed at investigating the effect of the microstructure evolution on the CTE during heat treatment of the electroformed Invar. Finally, we propose optimal process conditions to manufacture the Invar FMM applied for an ultra high definition (UHD) grade of the OLED display.

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