Abstract
Abstract A micromechanical scanning tunnelling microscope (μ-STM) is fabricated on a 2.5 mm square chip by an advanced very-large-scale integrated circuit technology with a minimum dimension of 0.6 μm and alignment accuracy of 0.1 μm. The μ-STM is designed to fit into a transmission electron microscope (TEM) for direct observation of the tip apex. The electrostatic actuators and springs are designed to produce a large force that is linear with applied voltage to overcome the forces between the tip and sample. The μ-STMs have been operated and shown to work reliably, even during observation of the tip apex in a TEM machine. This demonstrates the possibility of analysing the tunnelling gap physics and material transport mechanism at the tip apex using a TEM.
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