Abstract
This article reports the observation of the vacuum tunnel gap between two conductors using a high resolution transmission electron microscope. A 2.5-mm-sq micromachined tunneling microscope chip has been fabricated with a minimum feature size of 0.4 μm. The chip fits into a modified side-entry transmission electron microscope holder. The electrostatic actuators and springs are designed to produce a large force which is linear with applied voltage to overcome the forces between the tip and sample. The tunnel gap is controlled by a purpose-built feedback controller. One-dimensional micromachines work reliably during observation of the tip apex in a transmission electron microscope, allowing the voltage and current to be changed while the tunnel gap is observed. Two-dimensional machines that can scan the tip have also been tested and shown to be functional.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
