Abstract
Porous conductive carbon films are useful for application in fuel cells and biomedical sensors. Controllability of the porosity in conductive carbon films was investigated by using unbalanced magnetron sputtering (UBMS). Here, we show through porosity analysis and plasma diagnostics that carbon films can be tuned to have porosity ranging from amorphous to porous by varying the working pressures from 3 to 140 mTorr in UBMS. The porosity control is attributed to the carbon adatom energy change by control of the working pressures. This approach enabled us to obtain porous carbon films of 44–68% with a high conductivity of 20–0.001 S/cm, implying the feasibility of porous conductive carbon films for advanced applications.
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