Abstract
RETURN TO ISSUEPREVNewsNEXTMAKING FILMS ONE LAYER AT A TIMEApplications of ATOMIC LAYER DEPOSITION now extend well beyond electronicsMITCH JACOBYView Author Information C&EN CHICAGOCite this: Chem. Eng. News 2011, 89, 31, 38–40Publication Date (Print):August 1, 2011Publication History Published online9 March 2012Published inissue 1 August 2011https://doi.org/10.1021/cen-v089n031.p038Copyright © 2011 AMERICAN CHEMICAL SOCIETYArticle Views16Altmetric-Citations1LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit PDF (663 KB) SUBJECTS:Atomic layer deposition Get e-Alerts
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