Abstract
In this study, ZnO thick films suitable for high frequency focused ultrasonic transducers with high piezoelectric properties, and low tensile stress were prepared by DC magnetron sputtering. The ZnO films were analyzed in detail by X-ray diffraction and scanning electron microscope. The sputtering growth process of ZnO films was optimized by improving the structural zone models (SZM). Based on the optimized process, a focused ultrasonic transducer, with a fused quartz acoustic lens structure, was fabricated by sputtering the ZnO thick films. The finite element method was used to complete the design, simulation, and evaluation of the transducer. Test results show that there was no crack in the piezoelectric layer of the transducer. The transducer had a center frequency of 50 MHz, with a high − 6 dB bandwidth of 119%.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
