Magnetron discharge with molybdenum target in argon

Abstract

This paper presents an analysis of the results of original experimental studies of magnetron sputtering of molybdenum cold and hot targets in argon at a pressure of 1-4 mTorr. The current-voltage characteristics (the I-V characteristics) of a magnetron discharge were measured at a discharge current of up to 10 A. It was found that the I-V characteristics of a magnetron with a cold target in the range of 5-6 A contain an inflection point. The intensities of the molybdenum and argon lines in the optical emission spectra of the discharge depend on both the discharge current and the argon pressure. With an increase in the discharge current, regardless of the argon pressure, the process of excitation of argon atoms passes the inflection point and enters a stationary state. The I-V characteristics of the hot target magnetron contain a maximum. The optical spectra of a magnetron discharge with a hot target contain two components: the emission spectrum of the discharge and the emission spectrum of the heated target. The dependence of the target temperature, calculated from these spectra, on the discharge power is described with a high confidence by an exponential. Similarly, the target temperature depends on the discharge current and pressure.