Abstract
In this work, the discharge characteristics of 130 mm diameter planar balanced magnetrons equipped with cold and hot titanium targets were studied. It is found that these devices operating in argon have significantly different I-V characteristics measured in the current density range of 10–100 mA/cm2. At different argon pressures, a hot target magnetron provided a given current at a higher voltage, and its I-V characteristics had maxima. The observed characteristics can be caused by gas heating and its rarefaction near the target, as well as by thermionic emission of the heated target.
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