Abstract
This letter has reported the impact of balanced and unbalanced magnetron sputtering on the CO gas sensing properties of ZnO thin films. It was noticed that the ZnO film deposited under a balanced magnetron (i.e., ZnO-BM) has superior sensing properties compared to the film deposited under an unbalanced magnetron configuration (i.e., ZnO-UBM). The optimum operating temperature (Topt) was determined as 250 °C for the ZnO-BM sample with a sensor response of ∼ 85.5 % and a faster response/recovery time (∼ 28 s/55 s). Further, the ZnO-BM sample demonstrated a notable response to even 1 ppm CO gas at Topt and exhibited a detection limit of 69 ppb. Also, it displayed remarkable selectivity and stability towards CO gas, which makes it a preferable choice for an energy-efficient CO gas sensor.
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