Abstract
Results of Shubnikov–de Haas (SdH), cyclotron resonance (CR), and Hall-effect measurements on δ-doped InSb:Si films grown by molecular-beam epitaxy on insulating InP substrates are reported. The investigation covers samples with sheet densities of Si dopant atoms ranging from 1×1011 to 1×1013 cm−2, temperatures from 4.2 to 300 K, and fields from 0 to 7 T. The SdH oscillations show that the samples contain electrons of two-dimensional nature, occupying multiple subbands. The effective masses obtained from the CR data correspond well to the subband occupation densities. The Hall measurements as well as the CR experiments also give evidence for the presence of additional electrons, with the conduction-band-edge mass m*=0.014m0 of bulk InSb, which exist presumably in the bulk of the films.
Published Version
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