Abstract
The effect of magnetic field in the saturation regime of sub µm MOSFETs is being reported here for the first time. The study was based on bulk MOSFETs featuring a high-κ/metal gate with an equivalent oxide thickness of 2.4 nm. Channel length ranged from 1 µm down to 50 nm, while width was kept constant at 10 µm. It is found that it is possible to extract a magnetoresistance mobility µMR even in the saturation regime of operation and in turn study the observed µMR against channel length, temperature, drain voltage and gate voltage. For these sub-micron devices, electron transport is influenced by the high electric field that exists in the channel and velocity saturation, velocity overshoot and even quasi-ballistic effects could play a role for the shortest channel lengths Here, the observed µMR behavior is well interpreted using velocity saturation and overshoot effects.
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