Abstract
Magneto-optical spectroscopy and hysteresis loops have been used to study nondestructively the effect of 100-keV Ne+ implantation in epitaxial Y3Fe5O12 thin films. The results show the formation of a damaged layer of 0.13 μm thickness. The stress-induced anisotropy field reaches maximum values of 3.2×104 A/m for an ion dose of 2×1014 cm−2. A decrease in both magnetization and magnetostriction down to 3.6×104 A/m and −1.2×10−6, respectively, was observed for an ion dose of 4×1014 cm−2. The magneto-optical spectra were found to reduce in magnitude but not in shape with increasing implantation dose.
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