Abstract
CuFe2O4/Pt/Pb(Zr0.52Ti0.48)O3 (PZT) multilayer thin films were grown on (111)-oriented Pt/TiO2/SiO2/Si<100> substrate. PZT layer was fabricated by the sol-gel method. Afterwards, Pt layer was deposited by ion beam sputtering method. Finally, CuFe2O4 layer were deposited using pulsed laser deposition method (PLD). The film structure is tri-layered type, where the bottom PZT layer covered the whole substrate, while Pt and CuFe2O4 layers were deposited through circular shadow masks to measure ferroelectric and magnetoelectric properties. Film microstructure was observed using XRD and FE-SEM. Magnetoelectric coefficients were calculated by measured magnetoelectric voltages using magnetoelectric measurement system.
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