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https://doi.org/10.1109/tjmj.1988.4563733
Copy DOIPublication Date: Jun 1, 1988 | |
Citations: 1 |
As trends continue toward lighter and more compact equipment, the preparation in thin film form of rare earth magnets with high energy products, by liquid quenching, sputtering and other methods, is being studied. In a previous report, the authors described the effect of the substrate temperature and film deposition rate on the magnetic properties of Nd-Fe-B films prepared by dc diode sputtering and reported that by choosing the film fabrication conditions appropriately, it was possible to obtain films with an anisotropy in the thickness direction. However, the films thus prepared had a small coercivity, and also suffered from poor reproducibility of magnetic characteristics. In the study reported, in consideration of the reproducibility of film properties, the authors used a dc triode sputtering method to prepare films, and investigated the effect of the annealing conditions on the film coercivity.
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