Abstract
Soft magnetic properties have been obtained in films cosputtered using dual targets of Fe and Cr2O3. The resultant Fe–Cr–O films are considered to be mainly composed of nanocrystalline Fe and an amorphous intergranular region of Cr and O. The coercivity decreases rapidly with decreasing volume fraction of Fe, resulting in good soft magnetic properties. This rapid decrease is attributed to the grain size reduction of bcc-Fe, where the so-called random anisotropy model for a single-phase nanocrystalline system is quantitatively applicable to the present granular one. The saturation magnetization 4πMs, coercivity Hc, relative permeability µ′ at 500 MHz, and ferromagnetic resonance frequency of the Fe80Cr7O13 film with average Fe grain size of 5.5 nm are 14.0 kG, 1.5 Oe, 1470, and 1.80 GHz, respectively. Furthermore, it is found that the additional elements such as Cu and Rh decrease Hc and increase the in-plane anisotropy field Hk of the Fe–Cr–O film.
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