Abstract
Thin films of FeCoB-O were deposited by reactive magnetron sputtering in a Ar + O 2 atmosphere with the oxygen partial pressure RO2 varied. The dependence of soft magnetic properties and high frequency characteristics on oxygen partial pressure were investigated systematically. With the increase in R O2 from 1.1% to 1.5%, the films exhibited small coercivity H c and large in-plane uniaxial anisotropy field Hk. A largest Hk value of 70 Oe was obtained for the sample of RO2 = 1.3% with Hc = 7.1 Oe, a saturation magnetization 4πMs = 10.2 kG and a resistivity ρ = 3638 μΩ·cm were consistently obtained, resulting in excellent high frequency characteristics, such as high ferromagnetic resonance frequency of 3.0 GHz combined with a large real part of complex permeability of 145, implying that the film is promising for high frequency applications. Such good soft magnetic properties are ascribed to the exchange coupling among magnetic particles.
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