Abstract
In this study, we present a method for fabricating magnetic dots array through nanosphere lithography and reactive-ion etching. Through this technique, one can control the magnetic dot size by tuning the etchingtime of nanospheres. As a demonstration, [Co (3A)/Pt (10A)] 15 films and dots were fabricated on Al2O3 (0001) with Pt (111) buffer layers at 100°C. The measurement of polar magneto-optical Kerr effect showed a perpendicular magnetic anisotropy in both cases and a low squareness in Co/Pt nanodots system. The investigation of magnetic force microscopy showed that Co/Pt nanodots displayed a single domain behavior.
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