Abstract
The magnetic behavior of CoPt–AlN granular structure laminated with AlN layers has been studied. Ultrathin multilayer structure, [CoPt0.5 nm/AlN0.5nm]4, is used as the precursor of the magnetic layers, which are separated by 5-nm-thick AlN layers. Upon thermal annealing, the ultrathin multilayer transforms into CoPt–AlN granular structure, and the thick AlN layers remain to be spacers. When the film was annealed at 400 °C, the out-of-plane direction becomes the easy axis of magnetization, although the coercivity remains small. TEM observation has proved that CoPt shows disklike shape at such an annealing temperature. When increasing the annealing temperature to 600 °C and above, the films show “isotropic” magnetic behavior due to the formation of equiaxial CoPt particles in the magnetic layers.
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