Macroparticle-free TiN films prepared by arc ion-plating process

Abstract

TiN thin films prepared by the arc ion-plating process usually have a significant quantity of macroparticles on their surface. In this experiment a rotating target was used to apply the centrifugal effect to prevent the formation of macroparticles on the surface of TiN thin films. The number of macroparticles was measured using an image analysis method and investigated as a function of the rotational velocity of the target. When the rotational velocity was over 3000 rev min -1, the number of macroparticles on the film surface was markedly reduced. When the rotational velocity was higher than 4200 rev min -1, the film surface became almost macroparticle free.