Abstract
Focused ion beam (FIB) milling is one of the fastest and accurate processes for the micro- and nanofabrication of devices. There is a need of making micro- and nanoscale components from cemented carbide material due to its favorable properties of high hot hardness and wear resistance. These are the required properties of a microtool during micromachining. Efforts have been put forward to investigate the machinability aspects of cemented carbide by the FIB milling process. Beam current was observed as the significant process parameters of FIB milling process to affect the material removal rate (MRR) and surface roughness on the machined surface of cemented carbide. In addition, extraction voltage, angle of beam incidence, and percentage overlap between beam diameters of adjacent pixels were taken into account to analyze the machinability aspects of cemented carbide by FIB milling. Dwell time was observed as a less significant parameter to affect MRR and surface roughness of cemented carbide.
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