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Abstract
A series of MgxZn1-xO alloy films were grown on m-plane sapphire by low-pressure metalorganic chemical vapor deposition (LP-MOCVD). Optical and structural characterizations indicated that the films with Zn mole fraction up to 55% are single-cubic-phased, and the optical bandgap of Mg0.45Zn0.55O film is 4.7 eV. The epitaxial relationships between substrate and rocksalt MgZnO layers were determined as (110)MgznO (1010)sapphire, [001]MgZnO [1210]sapphire, and [110]MgZnO [0001]sapphire. The fixed uniform orientation of the films was accompanied by an improvement in crystal quality. A metal-semiconductor-metal structured solar-blind ultraviolet detector fabricated on Mg0.45Zn0.55O film showed a response peak at 260 nm and a sharp cutoff at 278 nm.
Published Version
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