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https://doi.org/10.1889/1.4731190
Copy DOIPublication Date: Dec 1, 1996 | |
Citations: 1 |
Abstract— Transparent photoluminescent ZnGa2O4 and Tb‐doped Y3Al5O12 (YAG:Tb) thin films were deposited on sapphire substrates at 300°C by laser ablation. The targets were made from ZnGa2O4 and YAG:Tb powders prepared with a novel ceramic processing technique (combustion synthesis). The deposition of the films was performed in ultrahigh vacuum with a KrF excimer laser (wavelength = 248 nm) with a fluence of 3.6 J/cm2 and a repetition rate of 30 Hz. X‐ray diffraction and Auger measurements taken on as‐deposited films indicated that the films were amorphous and showed a reduction in oxygen when compared to the bulk targets, and were not photoluminescent. Post‐annealing treatments in air for at least 1 hour in the range 800–1200°C induced crystallinity and recovered blue photoluminescence on ZnGa2O4 and green photoluminescence on YAG:Tb thin films, respectively.
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