Luminescent ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells

Abstract

Abstract Ordered arrays of nanoporous Si nanopillars and Si nanopillars with nanoporous shells were fabricated using a combination of nanoimprint lithography and metal-assisted chemical etching. They show visible luminescence with an overlap of 2 red emission bands at room temperature. Nanoporous Si nanopillars are formed in highly doped p-Si after metal-assisted chemical etching, while Si nanopillars with nanoporous shells are formed in lightly doped p-Si. The cathodoluminescence intensity is clearly larger in the Si nanopillars with nanoporous shells because they exhibit more luminescence centers at the oxidized surfaces.