Abstract
This article reviews the present practices, limitations, and understanding of thin sputtered M0S2 films. Sputtered M0S2 films can exhibit remarkable tribological properties such as ultra-low friction coefficients (0.01) and enhanced wear lives (millions of cycles) when used in vacuum or dry air. To achieve these favorable tribological characteristics, the sputtering conditions during deposition must be optimized for adequate film adherence and appropriate structure (morphology) and composition.
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