Abstract
The lubricating performance of amorphous silicon carbide films deposited by electron cyclotron resonance plasma is greatly improved by annealing at 800 °C. The annealed film has a significantly long lubricating life with a low friction coefficient. Detailed information about the molecular structures at the tribological interface is obtained using microbeam surface analytical methods (micro-Fourier-transform-infrared spectroscopy, laser Raman spectroscopy, micro-x-ray-photoelectron spectroscopy, and scanning Auger microprobe). These analyses show that the lubrication performance is improved as a result of a wear-resistant molecular network composed of the covalent bonds between poorly hydrogenated silicon and carbon. The low hydrogen content in these moieties is achieved from the high-temperature annealing effect.
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