Abstract
Amplification chracteristics of a discharge excited KrF laser with UV-preionized were investigated. The power gain(Iout/Iin) of a single-pass amplifier system were 20, 7 for input intensity of 50 kW, 0.5 MW, respectively. The small signal gain, absorption coefficient, and saturation intensity were calculated by one-dimensional propagation amplifier model. The KrF* formation efficiency, the extraction efficiency, and the power efficiency were also obtained with this numerical model.
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