<title>Polyimide optical waveguide with multi-fan-out for multichip module system</title>

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We have been developing a special purpose parallel processor system with a compact size and a high performance specific for the scientific computation. A multichip module (MCM) with a high speed bus is indispensable to achieve such parallel processor system. We have developed a high speed bus for such MCM using a polyimide optical waveguide with micro-mirrors. We can easily obtain many output signals from one input signal in this optical waveguide. Such polyimide optical waveguide with micro-mirrors is formed on a MCM substrate which is called an optical plate. An optical coupling between the polyimide optical waveguide and the laser diode or the photodetector on LSI chips is performed through the micro-mirror. We observed twenty output signals for the photodetectors from one input signal in the polyimide waveguide of fabricated test module. We have also evaluated the performance of parallel processor system using such MCM with the polyimide optical waveguide by computer simulation.© (1998) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.