Abstract
A new way of creation of the stable and constantly reproduced at various experiments surface microwave discharge near a flat dielectric antenna was developed and experimentally investigated at a wide range of air pressure <i>p=10<sup>-3</sup> ÷10<sup>3</sup> torr</i>. The breakdown characteristics determining a threshold of a surface microwave discharge appearance were studied. Longitudinal size and velocity of spreading of a surface microwave discharge in air were determined at a wide range of gas pressure, microwave power and pulse duration. The spatial-temporary evolution of electron density, gas and vibrational temperatures were investigated. It is shown that the surface microwave discharge can be used as a plasma source for microelectronics and material processing.
Published Version
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