<title>Improvement of microtorsional mirror for high-frequency scanning</title>

Abstract

In the present study, a novel micro torsional mirror used as a high frequency optical scanner is proposed. The proposed micromachiend torsional mirror exploits the electrostatic torque generators and a reinforced mirror plate to improve the performance of the device. Although the torque generator is driven by gap closing electrodes, its traveling distance is remarkably magnified by a novel lever mechanism. Moreover, the torque generators could drive of the mirror plate without wobble motion. A reinforced frame is used to stiffen the mirror plate to improve the optical performance of the scanner. In order to demonstrate the concept proposed in this study, micromachined torsional mirrors were fabricated through the integration of the DRIE, the surface and the bulk micromachining processes. According to the measurement, the proposed micro torsional mirror could operation in relativity low voltage, the scanning frequency of the mirror can reach 17.7 kHz, and the optical scan angle is 5 degrees.