Abstract
Abstract Stiffness of micromachined structures is limited by thin film thickness. Hence, static loads such as thin film residual stresses, or dynamic loads such as the inertia force could significantly deform the thinness micromachined torsional mirror. This work aims to stiffen the thin film micromachinined torsional mirror. The proposed torsional mirror exploits a reinforced frame to improve the stiffness of the mirror plate. Consequently, the mirror plate has less deformation no matter subject to the residual stresses or to the dynamic inertia force. In addition the reinforced frame stiffen the mirror without increasing the mass significantly. In application of this technique, the micro torsional mirror was fabricated through the integration of DRIE, conventional bulk and surface micromachining processes. The experimental results demonstrated that the proposed design significantly improves the flatness of the mirror plate in both static and dynamic conditions. Consequently, the optical performance of the micro torsional mirror was improved.
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