<title>Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking</title>

Abstract

In this paper, we report our success in the fabrication of optical diffractive gratings by means of direct embossing on sol-gel derived glasses. The sol-gel glass film is derived from composite organic-inorganic material with spin-coating. No baking is required during the whole processing. As a preliminary result, the grating with a period of 1.102 micrometers and a thickness of 57.2 micrometers has been successfully fabricated. Our experiments provide a simple and low temperature approach for fabricating optical gratings useful in integrated optics.