<title>Component development and integration issues for bio/chemometric appliations of VCSEL and MOEMS arrays</title>

Abstract

The rapid advancement of electro-optical components and micro-mechanical devices has led to increased functionality in decreasing package sizes. In particular, the development of massively parallel arrays of optical sources such as Vertical Cavity Surface Emitting Lasers (VCSEL) and innovative micro-opto-electro-mechanical systems (MOEMS) has opened the door for new possibilities. Recently, there has been a drive toward integration of the sensing, processing and actuation functions in a single package for fully integrated performance. One area which can benefit from this research is real time, spectroscopic analysis of biological and chemical samples. Numerous situations require a compact, self-contained bio/chemometric system for rapid, low cost spectral analysis or monitoring. To fully realize this potential, further component development and integration issues must be addressed. This paper will present the status of the VCSEL and MOEMS programs at the Institute and initial integration activities. The VCSELs are based on multiple quantum well Ga/As/InGaAs and GaAs/AlGaAs architectures with monolithic, epitaxially grown distributed Bragg reflectors. The VCSEL arrays have 6-15 micron apertures, 100 micron pitch and a mA threshold current. In parallel, the MOEMS program is focused on the development of active, reconfigurable diffractive and reflective arrays whose surface topology can be changed in real time. These MOEMS arrays can be sued to redirect light for flexible interrogation of samples. The combination of these two technologies offers a unique opportunity for fully functional systems on a chip.