Abstract
We review selected micro- and nano-systems developed recently at the Physical Electronics Laboratory of ETH Zurich using industrial CMOS technology in combination with post-processing micromachining and film deposition: (1) an infrared sensor microsystem for presence detection of persons, (2) calorimetric, capacitive, and gravimetric chemical sensor microsystems for detection of volatile organic compounds in air, and (3) a parallel scanning AFM chip. The microsystems combine sensor structures and read- out circuitry on a single chip.
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