Abstract
Combination of Integrated Optics and micro-machining technologies offer immense potential for sensor applications. Small mechanical deformations can often produce considerable changes in optical properties of devices resulting in drastically improved sensitivities. Here we prose and analyze a novel pressure sensor consisting of integrated optic Mach-Zehnder interferometer whose sensing arm is fabricated on a silicon micro-machined diaphragm. The analysis consists of determining the changes in optical output corresponding to the diaphragm deflections due to impressed pressure. Dynamical equations of motion are solved and resulting displacement fields are related to refractive index and optical path length changes of the Mach-Zehnder interferometer. Results can be used to obtain the change in sensitivity due to change sin path length and refractive index variations. The analysis can easily be applied to other MOEM sensor devices like those consisting of micro-machined vibrating cantilevers and bridges controlling optical waveguides, directional couplers or multi-mode-multi-waveguide structures.
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