Abstract
The production of PLZT thick-films for piezoelectric devices prepared from perovskite-type (Pb, La)(Zr, Ti)O 3 powders is described. The powder manufacture, paste preparation and thick-film production compatible with the low temperature co-fired ceramics (LTCC) process are detailed. The maximum firing temperature of applied technology is 850 °C. Measurements of the dielectric and piezoelectric properties of the produced films are carried out. The low dielectric loss (0.022) and high d 33 and d 31 piezoelectric coefficients (85.7×10 −12 and −34.6×10 −12 m/V, respectively) of the material, together with a relatively low sintering temperature, make it suitable for various applications, e.g. ultrasonics.
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