Abstract
A lateral-current-injection (LCI) membrane distributed-feedback (DFB) laser with a surface grating structure (incorporating a slight step) emitting in the 1550 nm wavelength range was fabricated on a Si substrate by the adhesive bonding of benzocyclobutene. For a semiconductor membrane thickness of 158 nm and a surface grating depth of 30 nm, a threshold current of as low as 390 µA, with a corresponding threshold current density of 540 A/cm2, was obtained for a cavity length of 360 µm and a stripe width of 0.2 µm under a room-temperature continuous-wave (RT-CW) condition.
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