Low-temperature electron mobility in heavily n-doped junctionless nanowire transistor

Abstract

The electron mobility in a heavily n-doped junctionless nanowire transistor is demonstrated by the experimental investigation of the transfer characteristics at low temperatures. It is found that the minimum electron mobility at a critical low temperature results from the interplay of the thermal activation and impurity scattering. The temperature-dependence tendency of the normalized electron mobility by theoretical calculation and experimental extraction reveals that the thermal activation is responsible for the impact of the donor ionization and thermal energy on the electron mobility.