Abstract
Deuterated polysiloxane with high transparency and high thermal stability was newly synthesized for use as optical waveguide material. Single-mode channel waveguides using the polymer were fabricated by conventional photolithography and dry etching. The propagation loss of the channel waveguides was measured and found to be 0.17 dB/cm at 1.31 /spl mu/m and 0.43 dB/cm at 1.55 /spl mu/m. The thermal and environmental stability of the waveguides was demonstrated by the fact that the propagation loss remained unchanged after tests at 200/spl deg/C for 30 min, at 120/spl deg/C for 1000 h, and at 75/spl deg/C and 90% RH for 1000 h.
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