Abstract
In order to obtain the linear relationship between the recorded pressure of a spinning rotor gauge and the true pressure in the range close to the offset region, the least square method was applied for the determination of the adequate offset value. The pressure data in the region between the offset region and the linear region were employed for the deviation to be minimized. The linearity was extended to the range of approximately 10 −6 Pa, which is one order of magnitude lower than that obtained by the conventional method based on the average offset value. In addition, the noise spectrum appeared in the offset value was discussed.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
