Abstract
AbstractAs one of the most powerful surface analytical techniques, Auger electron spectroscopy (AES) has repeatedly shown itself to be invaluable in solving problems involving submicron spatially resolved features. Recent developments of this technique towards higher spatial resolution at low primary beam energies and high‐sensitivity chemical state analysis have extended the application of AES as a problem‐solving tool.The MICROLAB 310‐F from Fisons Instruments (VG Scientific) uses a Schottky field emission source and optimized electron optics to give unparalleled performance at low primary beam energies (3 keV or less) and up to 50 times the usable beam current density when compared to a conventional LaB6 emitter. Two examples of analysis of small features will be shown, demonstrating the advantages of a low primary beam energy for AES analysis.
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