Abstract

We report, for the first time to our knowledge, on the fabrication of planar waveguides in Er3+/Yb3+ co-doped silicate glasses by 6.0MeV carbon implantation with a dose of 6.0×1014ions/cm2. The guiding properties are measured by the prism-coupling and end-face coupling methods with a He–Ne beam. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method, which shows a typical “enhanced well+optical barrier” distribution. The micro-luminescence and Raman investigations reveal that the bulk features are not deteriorated significantly by the carbon implantation in the waveguide, exhibiting possible applications for integrated active photonic devices.

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