Low Voltage Rf Mems Capacitive Shunt Switches

Abstract

Micro-electro-mechanical-systems(MEMS) switches have low resistive loss, negligible power consumption, good isolation and high power handling capability compared with semiconductor switches. Lifetime of capacitive shunt switches strongly depends on the actuation voltage so low voltage switches is necessary to enhance its performance as well as to broaden its application area. This paper presents the design and simulation of low voltage capacitive shunt MEMS switches together with its RF performance for high frequency applications. The low voltage switches are realized by lowering the spring constant of the beam using serpentine spring designs together with large capacitive area so as to achieve the good RF performance as well. The pull-in voltage is analyzed with commercial CAD finite element analysis software CoventorWare. The electromagnetic performance in terms of scattering parameters, insertion loss, and isolation are analyzed with software Ansoft HFSS10. The switches achieved insertion loss $$<$$ < 0.47 dB in on state from 2 to 40 GHz; it provided better than 25 dB isolation in off state with a capacitance ratio of 94---96. The actuation voltage as low as 1.5 V with actuation area $$110\,\times \,100\,\upmu \mathrm{m^2}$$ 110 × 100 μ m 2 along with good RF performance is reported. The design parameter optimization including selection of appropriate number of meanders and its width found to be one of the most sensitive factors affecting the spring stiffness and actuation voltage.